Analytical solutions of the azimuthal deviation of a polarizer and an analyzer by polarizer-sample-analyzer ellipsometry.

نویسندگان

  • Yu Faye Chao
  • Kan Yan Lee
  • Yi De Lin
چکیده

The analytical solutions of the azimuthal deviation of a polarizer and an analyzer were obtained by polarizer-sample-analyzer ellipsometry with a three-intensity measurement technique. By performing two sets of this three-intensity measurement with the polarizer's azimuth set at 45 degrees and at -45 degrees , we were able to obtain a set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the analyzer.

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عنوان ژورنال:
  • Applied optics

دوره 45 17  شماره 

صفحات  -

تاریخ انتشار 2006